[1]吕辉,李根.微型磁通门纳米孔薄膜铁芯微观结构改进方案[J].探测与控制学报,2020,42(03):57.[doi:.]
 L Hui,LI Gen.Microstructure Improvement of Nanoporous Film Core for Micro Fluxgate [J].,2020,42(03):57.[doi:.]
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微型磁通门纳米孔薄膜铁芯微观结构改进方案()
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《探测与控制学报》[ISSN:1008-1194/CN:61-1316/TJ]

卷:
42
期数:
2020年03
页码:
57
栏目:
出版日期:
2020-06-15

文章信息/Info

Title:
Microstructure Improvement of Nanoporous Film Core for Micro Fluxgate
文章编号:
1008-1194(2020)03-0057-05
作者:
吕辉1李根2
1.河南理工大学电气工程与自动化学院,河南 焦作 454000;2.河南工业和信息化职业学院信息工程系,河南 焦作 454000
Author(s):
L Hui1 LI Gen2
1. Electrical Engineering and Automation institute, Henan Polytechnic University, Jiaozuo 454000, China;2. Information Engineering Institute, Henan College of industry information technology, Jiaozuo 454000, China )
关键词:
微型磁通门纳米孔薄膜铁芯降噪
Keywords:
micro fluxgatenanoporousfilm core noise reduction
分类号:
TP212
DOI:
.
文献标志码:
A
摘要:
针对薄膜铁芯传统制作方法所得纳米孔洞结构的分布与尺度完全随机不可控的问题,提出了微型磁通门纳米孔薄膜铁芯微观结构改进方案。该方案采用二步阳极化法进行多孔氧化铝模板生长,并在模板基础上完成可控的纳米多孔软磁薄膜的制备。实验验证结果表明,薄膜铁芯中的纳米多孔微结构,能够降低铁芯的磁畴体积和磁畴间的相互作用数量,从而有效改善薄膜铁芯的磁性能,降低器件噪声。
Abstract:
Aiming at the problem of randomness and uncontrollability of the distribution and scale of nano-holes obtained by traditional fabrication methods of nano-film core, an improved scheme of micro-fluxgate nano-porous film core structure was proposed. In this method, porous alumina templates were grown by two-step anodization method, and controllable nanoporous soft magnetic films were prepared on the basis of templates. The experimental results showed that the nanoporous microstructures in the thin film core could reduce the domain volume and the number of interaction between magnetic domains, thus effectively improved the magnetic properties of the thin film core and reduced device noise. This method provided a feasible micro-improvement idea for the optimization of soft magnetic thin film core.

参考文献/References:

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备注/Memo

备注/Memo:
收稿日期:2019-12-11
基金项目:河南省自然科学基金项目资助(162300410123);河南理工大学博士基金项目资助(B2017-22)
作者简介:吕辉(1977—),男,山东菏泽人,博士,副教授,研究方向:微型传感器,智能传感器。E-mail:lvhui2007@163.com.
更新日期/Last Update: 2020-07-15