微尘粒子对微机械陀螺仪的可靠性影响仿真(PDF)
《探测与控制学报》[ISSN:1008-1194/CN:61-1316/TJ]
- 期数:
- 2008年01期
- 页码:
- 15
- 栏目:
- 出版日期:
- 2008-02-26
文章信息/Info
- Title:
- The Simulation of Impact of Particulate Contamination
on the Reliability of Comb Gyroscope
- 文章编号:
- 1008-1194(2008)01-0015-03
- Author(s):
- LIU Feng-li1; 2; HAO Yong-ping1; GAO Lian-xing2
- 1.R&D Center of CAD/CAM technology,Shenyang Ligong University,Shenyang 110168,China;
2.Engineering Institute, Shenyang Agriculture University,Shenyang 110161,China
- 分类号:
- TP212
- DOI:
- -
- 文献标识码:
- A
- 摘要:
- 借助CoventorWare软件，建立在微机械陀螺仪中质量块与底部电极间附有微尘的模型。在网格化后得到的有限元模型基础上，进行模态分析，得到了微尘对驱动和检测模态谐振频率的影响仿真。在载荷承受分析里，微尘使得微机械陀螺仪的临界载荷和载荷承受范围缩小。
- Abstract:
- A solid model with a particulate contamination located between the plate mass and the electrode is constructed through the CoventorWare software.In the modal analysis,the impact of particulate contamination on the driving and detecting modal resonance frequencies of comb gyroscope is researched on the basis of FEM model got after the model is divided into lattices.In the load press analysis,the load press critical value is reduced due to particulate contamination.
参考文献/References
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［2］Qiao Da-yong.MEMS reliability from a failure mechanisms perspective［J］.Microelectronics Reliability,2003,43:1 049-1 060.
［3］Coventor Inc.Architect Reference Guide and Tutorials［M］.NC:Coventor Inc,2003.
［4］Felnhofer D,Khazeni K.Device physics of capacitive MEMS［J］.Microelectronic Engineering,2007,84:2 158-2 164.
［5］王寿容.硅微型惯性传感器件理论及应用［M］.南京:东南大学出版社,2000.
［6］刘凤丽,郝永平,高连兴.静电驱动微机械梳状陀螺仪中典型结构的可靠性研究［J］.探测与控制学报,2007,29(1):72-75.
［7］Coventor Inc.Analyzer tutorials［M］.NC:Coventor Inc,2003.第30卷
备注/Memo
- 备注/Memo:
- *收稿日期：2007-09-20 修回日期：2007-11-05
基金项目：武器装备预研基金项目资助（51405040404QT2806)
作者简介：刘凤丽(1975-)，女，辽宁朝阳人，博士研究生，讲师，研究方向：MEMS可靠性研究与结构设计。
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更新日期/Last Update: 2008-04-02